• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention discloses a graphene membrane fiber F-P resonator with photothermal stress regulation and a manufacturing method thereof. The resonator takes graphene membrane as a resonant sensitive element, and the laser excitation end and the detection end adopt a structure in which the quartz capillary is combined with the ceramic ferrule. The method comprises: 1) welding the single-mode fiber and the quartz capillary with a fiber fusion splicer, and cutting the quartz capillary to a certain length with a fiber ultrasonic cutting knife, to form an initial cavity length of the Fabry-Perot interference cavity; 2) assembling the cut single-mode fiber-quartz capillary structure and the ceramic ferrule, and transferring the graphene membrane on the end surface of the ferrule; 3) fixing and aligning the regulating end structure assembled from the multi-mode fiber and the ceramic ferrule with the excitation end through a ceramic bushing, and 4) through adjusting distance between the multi-mode fiber end face and the graphene membrane, bonding and encapsulating the tail part of the ceramic ferrule and the fiber with epoxy resin. The present invention has the advantages of small structural size and adjustable membrane stress and resonant frequency.
    公开号:NL2027244A
    申请号:NL2027244
    申请日:2020-12-30
    公开日:2021-09-16
    发明作者:Li Ziang；Li Cheng；Fan Shangchun；Liu Huan
    申请人:Univ Beihang；
    IPC主号:
    专利说明:

    A GRAPHENE MEMBRANE OPTICAL FIBER F-P RESONATOR WITH PHOTOTHERMAL STRESS REGULATION AND CONTROL,MANUFACTURING METHOD THEREOF
    FIELD OF THE INVENTION The present invention relates to the technical field of resonators and optical fiber sensing, in particular relates to a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control, and a manufacturing method thereof.
    BACKGROUND Since 2004, owing to excellent thermal, mechanical and electrical properties, graphene has attracted extensive attention and lots of researches from scholars at home and abroad, and has an important application potential in the field of micro-nano sensors. Graphene is a crystal with a two-dimensional structure, and the thickness of a single layer is merely 0.335nm (please refer to: Novoselov K S, Geim A K, Morozov S V, et al. Electric field effect in atomically thin carbon films[J]. Science, 2004, 306(5696): 666-669.). Graphene is also the known material with the highest strength currently, with a fracture strength of 130GPa and an elastic modulus of 1.0TPa (please refer to: Lee C, Wei X, Kysar J] W, et al. Measurement of the elastic properties and intrinsic strength of monolayer graphene[J]. Science, 2008, 321(5887):385-388.). In addition, graphene also has a favorable thermal property, the thermal conductivity of a single layer of graphene is as high as S300W(m-K) (please refer to: Balandin A A, Ghosh S, Bao W, et al. Superior thermal conductivity of single-layer graphene[J]. Nano letters, 2008, 8(3): 902-907.), and the thermal expansion coefficient is -7x10-6K-1 (please refer to Bao W, Miao F, Chen Z, et al. Controlled ripple texturing of suspended graphene and ultrathin graphite membranes[J]. Nature Nanotechnology, 2009, 4(9):562-566.). These excellent properties of graphene provide possibility for the 1 graphene to become a resonator based on photothermal excitation and optical detection.
    At present, the research of the graphene resonator mainly involves realization of excitation and vibration pick-up manners, improvement of quality factors and tuning of resonant frequencies.
    For example, in 2007, J.
    Scott Bunch et al. from Cornell University of the U.S applied graphene membrane to a resonator for the first time, a single layer and multiple layers of graphene membranes manufactured by utilizing a mechanical exfoliation method are transferred to a silicon dioxide groove, two ends of which are provided with a positive electrode and a negative electrode.
    The graphene membranes and the silicon dioxide groove as a whole form a nano electromechanical system, and resonant frequency of graphene and quality factors are measured through methods of electrostatic excitation and optical interference detection (please refer to: J Scott B, Zande A M V D, Verbridge S S, et al.
    Electromechanical resonators from graphene sheets.[J]. Science, 2007, 315(5811):490-493.). In 2009, Changyao Chen et al. manufactured a single-layer graphene resonator, and researched influence of ambient temperature on the resonant frequency and quality factor.
    Experimental results show that, compared with normal temperature, the resonator shows a favorable resonant property under a low temperature (please refer to: Chen C, Rosenblatt S, Bolotin K 1, et al.
    Property of monolayer graphene nanomechanical resonators with electrical readout[J]. Nature Nanotechnology, 2009, 4(12):861-867.). In 2011, Robert A.
    Barton et al. utilized the graphene membrane prepared from a chemical vapor deposition method to design and manufacture circular mechanical resonators with different diameters, and removed PMMA on the surface of graphene membrane through a high-temperature manner.
    Experimental results show that the resonant frequency of the resonator increases along with a decrease in the size of the membrane, the quality factor is dramatically improved along with an increase in the size of the membrane, and prove that the graphene resonator can realize a superhigh quality factor (please refer to: Barton R A, Ilic B, Van d Z AM, et al.
    High, size-dependent quality factor in an array of graphene mechanical resonators[J]. Nano Letters, 2011, 11(3):1232-1236.). In 2013, Changyao Chen et al. prepared a graphene nano mechanical resonator, realized adjustment of tensile force of the graphene membrane 2 through the manner of static electricity regulation, and further changed the resonant frequency of the resonator to realize tuning (Chen C, Lee S, Deshpande V V, et al. Graphene mechanical oscillators with tunable frequency[J]. Nature Nanotechnology, 2013, 8(12):923-927.). In 2018, Dejan Davidovikj et al. introduced a graphene membrane mechanical resonator with controllable temperature and resonant frequency, the plate heater in the experiment can adjust the tensile force in the plane of the suspended two-dimensional material membrane, realizes tuning of the tensile force in the plane of the suspended graphene membrane by utilizing direct current Joule heating, and improves resonant frequency and quality factor, which also reveals the potential value of regulation of the graphene membrane resonator (please refer to Davidovikj D, Poot M, Cartamil-Bueno S J, et al. On-chip heaters for tension tuning of graphene nanodrums[J]. Nano Letters, 2018, 18(5):2852-2858.). In the same year, Robin J. Dolleman et al. experimented and demonstrated parameter resonance of the suspended single-layer graphene membrane, increased the laser driving voltage to adjust the prestressing force to record different modes of the resonator, and analyzed theoretically the photothermal stress regulation principles of graphene membranes (please refer to: Dolleman R J, Houri S, Chandrashekar A, et al. Opto-thermally excited multi-mode parametric resonance in graphene membranes[J]. Scientific Reports, 2018, 8(1):9366-9373.).
    In summary, based on the above analysis, scholars at home and abroad researched less on stress regulation and control of a graphene membrane resonator, and most researches are to adjust the graphene membrane through changing parameters at an excitation end or environmental factors, thereby that not only causes great damage to the membrane, but also changes initial state of the resonator so as to influence experimental results. To this end, in the present invention, graphene membrane is taken as a resonant sensitive element of the resonator, and by utilizing favorable thermal and mechanical properties of graphene, a graphene membrane resonator which can realize photothermal stress regulation by utilizing fiber and a manufacturing method thereof are proposed. In the method, on the basis of a traditional graphene 3 membrane F-P probe structure, a photothermal regulation and control structure is added, and thermal stress regulation of the graphene membrane can be realized on line, thereby avoiding influence of a change in the state of an excitation end or environmental factors in actual application on the resonant property of the graphene resonator, and having such advantages as small structural size, novel design, adjustable membrane stress and resonant frequency and improved quality factors and sensitivity.
    SUMMARY OF THE INVENTION The purpose of the present invention is to provide a graphene membrane optical fiber F-P resonator with a small size of the structure andnovel design, which may realize photothermal regulation and control on membrane stress, and a manufacturing method thereof. The resonator is composed of an excitation detection end and a regulating and controlling end, and may realize photothermal stress regulation and control on the graphene membrane in the resonator. To achieve the above objective, the present invention is realized through the following technical solutions: The design and manufacturing method of the graphene membrane fiber F-P resonator regulated and controlled through photothermal stress provided in the present invention includes the following steps: step 1, removing a coating layer on the outer layer of a single-mode fiber and a metal protection layer outside the quartz capillary, removing impurities attached onto the surface, cutting flat the end surfaces of the fiber and the quartz capillary by utilizing a fiber ultrasonic cutting knife, and grinding and polishing the end surfaces of the fiber and the quartz capillary, such that the inclined angle of each end surface is controlled within 0.2°; 4 step 2, welding the single-mode fiber and the quartz capillary in step 1 by utilizing a fiber fusion splicer, to ensure firm welding point; step 3, cutting the welded single-mode fiber and the quartz capillary in step 2 by utilizing a fiber ultrasonic cutting knife, wherein the cutting point is close to the quartz capillary, then grinding and polishing the end surface of the capillary, and removing impurities on the surface and inside of the quartz capillary with an ultrasonic cleaner; step 4, inserting the cut single-mode fiber - quartz capillary structure in step 3 into the inside of a ceramic ferrule with a three-dimensional fiber micro-motion platform, and bonding the tail parts of the quartz capillary and the ceramic ferrule with epoxy resin adhesive after the end surface of the quartz capillary is flush with the end surface of the ceramic ferrule; step 5, transferring the graphene membrane to the surface of the probe structure in step 4, drying and processing the graphene membrane which is transferred to the base of the ferrule by utilizing a heating incubator, to finish manufacturing of the excitation detection end of the probe of the resonator; step 6, removing the coating layer on the outer layer of the multi-mode fiber, cutting flat the end surface by utilizing a fiber ultrasonic cutting knife, and transferring to the inside of the ceramic ferrule, to finish manufacturing of the photothermal regulating and controlling end of the probe of the resonator; and step 7, fixing and aligning the photothermal excitation detection end and the regulating and controlling end of the probe in step 5 and step 6 by utilizing a ceramic bushing, adjusting the distance between the multi-mode fiber and the graphene membrane by aid of a three-dimensional fiber micro-motion platform, and sealing the tail parts of the multi-mode fiber and the ceramic ferrule with epoxy resin adhesive, to finish manufacturing of the graphene membrane resonator with regulatable and controllable fiber photothermal stress.
    Wherein the graphene membrane resonator includes excitation detection, and photothermal regulation and control, with the functions respectively being excitation/ vibration pick-up of the resonator and photothermal stress regulation of the graphene membrane.
    Wherein the quartz capillary in step 1 is a hollow structure, the outer diameter of which is 125um and is matched with the diameter of a single-mode fiber, and the inner diameter of which is 50pm.
    Wherein the excitation detection end of the probe of a resonator in step 5 has an inner and an outer layer of structure, wherein the outer layer is a ceramic ferrule structure, and plays a role of protecting and supporting the graphene membrane; and the inner layer is a single-mode fiber - quartz capillary structure which is flush with the end surface of the ceramic ferrule so as to realize excitation and vibration pick-up to the graphene membrane.
    Wherein the graphene membrane in step 5 is simultaneously attached onto the end surfaces of the ceramic ferrule and the quartz capillary, and the size corresponding to the peripheral clamped conditions of the graphene circular diaphragm is consistent with the size of the used quartz capillary.
    Wherein a multi-mode fiber core is used on the side of the photothermal regulating and controlling end of the probe of the resonator in step 6, however, type of the fiber is not limited to the above, and it can be expanded to single-mode fiber, photonic crystal fiber, etc.
    Wherein an inner diameter of the ceramic bushing in step 7 is used for alignment of graphene membrane and multi-mode fiber attached onto the end surface of the quartz 6 capillary.
    Moreover, the ceramic bushing may use a notching or closed structure according to requirements of application conditions.
    Wherein the graphene membrane used by the diaphragm-type fiber F-P resonator can be in a single layer, few layers or multiple layers, and can also be a circular diaphragm, a beam diaphragm or of other structures.
    The diaphragm is not limited to graphene membrane, and can be expanded to other sensitive diaphragms, such as a silicon membrane, a silver membrane, a MoS; and other organic diaphragms.
    The present invention further provides a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control, and the resonator is manufactured through the above method of manufacturing.
    The present invention has the following advantages compared with the prior art: (1) The excitation and vibration pick-up of the resonator in the present invention respectively adopt methods of photothermal excitation and fiber interference detection, which may avoid mechanical contact between elements to a certain extent and eliminate frictional force, further effectively avoid influences of such external factors as electromagnetic interference and chemical corrosion, to obtain a favorable sensitivity and signal to noise ratio; (2) The sensitive elements of the resonator in the present invention adopt the graphene membrane with favorable thermal and mechanical properties, its ultrathin thickness enables the graphene membrane to have a high dynamic range and measurement precision, and impermeability can also sense a pressure change to realize resonant measurement of pressure; (3) The quartz capillary adopted in the present invention is a hollow structure, whose small size of an inner diameter may effectively improve the resonant frequency of the 7 resonator and reduce amplitude of the graphene membrane so as to avoid the phenomenon of distortion of interference light in a spatial light detection method, and beneficially reduce such shortcomings as damage and folds produced during the transfer process of the graphene membrane; (4) The excitation detection end of the probe in the present invention includes a ceramic ferrule portion and a single-mode fiber - quartz capillary portion, and the ceramic ferrule may effectively protect its internal quartz capillary structure and support the graphene membrane; (5) Alignment of the excitation detection end and the photothermal regulating and controlling structure is realized through the ceramic bushing in the present invention, and on the other side of the excitation detection end, thermal stress regulation and control are performed on the graphene membrane by utilizing the fiber laser, so as to avoid a change of the structure of the excitation end and influence of a change in the vibrating environment of the resonator caused by the change of the structure of the excitation end on the resonant property; and (6) The present invention has such advantages as simple manufacturing, small structural size, high sensitivity, resistance to chemical corrosion and electromagnetic interference, and regulatable and controllable photothermal stress of the graphene membrane, and can be used in many fields like aerospace and biomedicine.
    BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a structural schematic diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control of the present invention; Fig. 2 is a manufacturing flow diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control of the present invention; 8
    Fig. 3 is a manufacturing process flow diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control of the present invention, wherein Fig. 3(a) shows alignment of end surfaces of a quartz capillary and a single-mode fiber, Fig. 3(b) shows determination of length of an initial cavity of an F-P interference cavity, Fig. 3(c) shows manufacturing of an excitation detection end of a probe of a resonator, Fig. 3(d) shows manufacturing of a photothermal regulating and controlling end of a probe of a resonator, and Fig. 3(e) shows manufacturing of a graphene membrane resonator with photothermal stress regulation and control. Reference numerals in the figures: 1, the tail end of single-mode fiber, 2, epoxy resin adhesive, 3, single-mode fiber, 4, ceramic ferrule used for an excitation detection end, 5, quartz capillary, 6, ceramic bushing, 7, graphene membrane, 8, ceramic ferrule used for a regulating and controlling end, 9, multi-mode fiber, 10, the tail end of multi-mode fiber.
    DETAILED DESCRIPTION The present invention will be described in detail below in combination with accompanying drawings, as a part of the present description, principles of the present invention are illustrated through embodiments, and other aspects, characteristics and advantages of the present invention will become apparent through the detailed description. Fig. 1 is a structural schematic diagram of a graphene membrane optical fiber F-P resonator of the present invention. The resonator is mainly composed of an excitation detection end and a regulating and controlling end, the excitation detection end mainly includes a single-mode fiber 3, a ceramic ferrule 4, a quartz capillary 5 and a graphene membrane 6, and the regulating end mainly includes a ceramic ferrule 8 and a multi-mode fiber 9. The graphene membrane 6 is not limited to be in multiple layers, 9 and can be in a single layer or in few layers, the shape of the graphene membrane 6 is a circular diaphragm; the outer diameter of the single-mode fiber 3 and the multi-mode fiber 9 1s 125um; the inner diameter of the ceramic ferrule is 125um, and the outer diameter is 2.5mm; the outer diameter of the quartz capillary is 125um, and the inner diameter is S0um; and the inner diameter of the ceramic bushing is 2.5mm.
    Fig. 2 and Fig. 3 respectively show a manufacturing flow diagram and a manufacturing process flow diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control.
    Based on the manufacturing flow as shown in Fig. 2, in reference with the process flow as shown in Fig. 3, the manufacturing process of the graphene membrane optical fiber F-P resonator is described with the peripheral clamped graphene circular diaphragm being a resonant sensitive element as an example.
    Firstly, a coating layer is stripped off at 2cm from the end surface of the single-mode fiber 3 with a wire stripper, further dust-free paper is used to dip into alcohol to gently wipe the single-mode fiber 3 along an axial direction so as to remove impurities attached onto the surface.
    Afterwards, the end surface of the single-mode fiber 3 is cut flat with a fiber cutting knife, and then the end surface is grinded and polished with a fiber grinding machine, further the single-mode fiber 3 is cleaned with alcohol and then placed at one end of a fiber fusion splicer (Fujikura-80C), further still, the cutting angle of the single-mode fiber 3 is observed in a panel of the fusion splicer and the angle is controlled to be within 0.2°. If the angle is too large, the fiber needs to be cut or grinded again.
    A layer of metal protection layer is outside the quartz capillary 5, and should be burned with a flame for about Ss, and then wiped with alcohol.
    Afterwards, the end surface of the quartz capillary 5 1s cut flat with a fiber ultrasonic cutting knife, and the end surface is also polished and grinded with a fiber grinder, and then placed at the other end of the fiber fusion splicer, further the cutting effect is observed, and the cutting angle is still controlled to be within 0.2°.
    Afterwards, the fusion splicer is adjusted to be in a multi-mode fiber splicing mode. The welding parameter is adjusted appropriately, and the interval between the end surface of the quartz capillary 5 and the end surface of the single-mode fiber 3 is set to be 15um (as shown in Fig. 3a). The premelting power is 20bit; the premelting time is 80ms; the first discharge power is 15bit; the discharge time is 100ms; the second discharge power is 30bit; and the discharge time is 180ms. A tensile test is performed after welding, and then the welding point is observed to ensure flat welding surface without obvious swelling and depression, bubbles or misplacement. In this way, the two ends of the welded single-mode fiber 3 and the quartz capillary 5 are clamped tightly with a fiber ultrasonic cutting knife. The head of the cutting knife is aligned with the welding point, and the cutting knife 1s placed under an integrated microscope where the position of the welding point is adjusted, such that the head of the cutting knife is arranged within a range of 50-100um from the welding point for cutting. Therefore, the length between the cutting point and the end surface of the single-mode fiber 3 can be determined to be the initial cavity length of the F-P interference cavity (as shown in Fig. 3b).
    Then, the combined structure manufactured from the single-mode fiber 3 and the quartz capillary 5, and the ceramic ferrule 4 are respectively placed into an ultrasonic cleaner to clean for 10min. Then the two are fixed at two ends of a three-dimensional fiber micro-motion platform, and the relative position of the end surface between the combined structure constituted by the single-mode fiber 3 - quartz capillary 5 and the ceramic ferrule 4 is observed with a microscope. The rotary knob at the side of the three-dimensional fiber micro-motion platform is adjusted to enable the combined structure to enter the inside of the ceramic ferrule 4. When the end surface of the quartz capillary S 1s flush with the end surface of the ceramic ferrule 4, the tail part of the ceramic ferrule 4 and the single-mode fiber 3 are bonded firmly with epoxy resin adhesive 2, and cured for 30min, after thatthe cured structure is subjected to end surface grinding and polishing by utilizing a fiber grinding machine, and then it is placed in an ultrasonic cleaner to clean for Smin. On this basis, the graphene 11 membrane 7 is transferred based on the end surface of the ferrule structure, such that the graphene membrane 7 is simultaneously attached onto the end surfaces of the quartz capillary 5 and the ceramic ferrule 4. A probe transferred with a graphene membrane 7 is placed in an incubator, and is heated at 50°C for 30min for drying treatment, so as to finish the manufacturing of the excitation detection end of the probe of the resonator (as shown in Fig. 3¢).
    Afterwards, the coating layer on the outer layer of the multi-mode fiber 9 is removed, further dust-free paper is used to dip into alcohol to gently wipe the multi-mode fiber 9 along an axial direction, so as to remove impurities attached onto the surface. The end surface of the multi-mode fiber 9 is cut flat with a fiber cutting knife, further the end surface is grinded and polished with a fiber grinding machine, and then the multi-mode fiber 9 is cleaned with alcohol and then transferred into the inside of the ceramic ferrule 8, so as to finish manufacturing of the photothermal regulating and controlling end of the probe of the resonator (as shown in Fig. 3d).
    Finally, the excitation detection end and regulating and controlling end of the manufactured probe are fixed and aligned with a ceramic bushing 6, further the distance between the multi-mode fiber 9 and the graphene membrane 7 is adjusted by aid of the three-dimensional fiber micro-motion platform, and then the tail parts of the multi-mode fiber 9 and the ceramic ferrule 8 are sealed with epoxy resin adhesive 2, so as to finish manufacturing of the graphene membrane resonator with regulatable and controllable optical fiber photothermal stress (as shown in Fig. 3e). The excitation and vibration pick-up of the manufactured graphene membrane fiber F-P resonator in the present invention respectively adopt a method of photothermal excitation and optical detection, which may effectively reduce frictional force and further effectively avoid influences of such external factors as electromagnetic interference and chemical corrosion, and to obtain a favorable sensitivity and signal to noise ratio, and the resonator has such advantages as simple manufacturing, small structural size, high sensitivity, and regulatable and controllable photothermal stress of the graphene 12 membrane, and can be used in many fields like aerospace and biomedicine. 13
    权利要求:
    Claims (9)
    [1]
    A manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control, comprising the steps of: Step 1, removing a coating on an outer layer of a single mode fiber and an outer metal protective layer the quartz capillary, removing impurities adhering to the surface, plane cutting the end surfaces of the fiber and the quartz capillary using a fiber ultrasonic cutting knife, and grinding and polishing the end faces of the fiber and the quartz capillary, such that the angle of inclination of each end surface is controlled within 0.2°; step 2, welding the single mode fiber and the quartz capillary in step 1 by using a fiber fusion welder, to perform tensile test and ensure solid welding point; step 3, cutting the welded quartz capillary in step 2 by using a fiber ultrasonic cutting knife, the cutting point is near the welding point, then grinding and polishing the end surface of the quartz capillary, and removing impurities on the surface and inside of the quartz capillary with an ultrasonic cleaner; step 4, inserting the cut single mode fiber quartz capillary structure in step 3 into the inside of a ceramic connection ring with a three-dimensional fiber micromotion platform, and connecting the ends of the quartz capillary and the ceramic connection ring with epoxy resin adhesive after the end surface of the quartz capillary is flush with the end surface of the ceramic connecting ring;
    step 5, transferring the graphene membrane to the end surfaces of the quartz capillary and the ceramic bonding ring in step 4, wherein the graphene membrane transferred to the base of the bonding ring is dried and processed by using a heating chamber to manufacture the excitation sensing device end of the resonator probe; step 6, removing the coating on the outer layer of the multimode fiber, cutting the end surface flat by using a fiber ultrasonic cutting knife, and transferring it to the inside of the ceramic bonding ring, to manufacture the photothermal regulating to complete the en-line end of the resonator probe; and step 7, securing and aligning the photothermal
    excitation sensing end and the control-and-control end of the probe in step 5 and step 6 by using a ceramic sleeve, adjusting the distance between the multimode fiber and the graphene membrane using a three-dimensional fiber micromotion platform, and sealing the ends of the multimode fiber and the ceramic bonding ring with epoxy resin adhesive, to complete fabrication of the graphene membrane resonator with controllable and controllable fiber photothermal stress.
    [2]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal voltage regulation and control according to claim 1, wherein the graphene membrane resonator comprises excitation detection and photothermal regulation, wherein the functions respectively include excitation/vibration of the resonator and photothermal voltage regulation and regulation of the graphene membrane.
    [3]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the quartz capillary in step 1 is a hollow structure, the outer diameter of which is 125 µm matched to the diameter of a single mode fiber, and whose inner diameter is 50 µm.
    [4]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal voltage regulation and control according to claim 1, wherein the excitation detecting end of the probe of a resonator in step 5 has an inner and an outer layer of structure, wherein the outer layer is a ceramic bonding ring structure, and plays a role of protecting and supporting the graphene membrane; the inner layer is a single mode fiber quartz capillary structure which is flush with the end surface of the ceramic bonding ring so as to realize excitation and vibration absorption to the graphene membrane.
    [5]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the graphene membrane is bonded to the end surfaces of the ceramic bonding ring and the quartz capillary simultaneously in step 5, and the corresponding size with the peripheral clamped conditions of the graphene circular diaphragm is consistent with the size of the quartz capillary used.
    [6]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal voltage regulation and control according to claim 1, wherein a multimode fiber is used on the photothermal regulating-and-control end side of the probe of the resonator in step 6, whether a single mode fiber or a photonic crystal fiber can be used.
    [7]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the ceramic sleeve is used in step 7 for alignment of graphene membrane and multimode fiber bonded to the end surface of the quartz capillary, in addition, the ceramic sleeve can use notch or closed structure according to requirements of application conditions.
    [8]
    The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the graphene membrane used by the diaphragm type fiber FP resonator may be provided in a single layer or multiple layers, and may also be a circular diaphragm or a beam diaphragm, or may be a silicone diaphragm, a silver diaphragm, a MoSs and other organic diaphragms.
    [9]
    A graphene membrane optical fiber F-P resonator with photothermal stress regulation and control, the resonator being manufactured by the manufacturing method according to any one of claims 1 to 8.
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    同族专利:
    公开号 | 公开日
    CN111239909B|2020-11-27|
    CN111239909A|2020-06-05|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    CN106908092B|2017-04-12|2019-01-25|北京航空航天大学|A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method|
    CN110487454A|2019-09-18|2019-11-22|大连理工大学|A kind of miniature film chip optical fiber end FP pressure sensor, production method and application|
    US8417084B2|2007-01-16|2013-04-09|Baker Hughes Incorporated|Distributed optical pressure and temperature sensors|
    CN103557929B|2013-11-14|2015-11-11|北京航空航天大学|A kind of Fabry-perot optical fiber sound pressure sensor method for making based on graphene film and measuring method, device|
    US9869592B2|2015-06-17|2018-01-16|Raytheon Bbn Technologies Corp.|Graphene-based bolometer|
    CN106289504B|2016-08-24|2019-07-19|电子科技大学|A kind of Fabry-perot optical fiber sonic probe device and preparation method thereof|
    CN110736564A|2019-10-30|2020-01-31|吉林大学|improved method for intrinsic F-P temperature and pressure sensing probe|CN111998932B|2020-08-04|2021-06-29|北京航空航天大学|Graphene corrugated film optical fiber F-P sound pressure sensor and manufacturing method thereof|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    CN202010093808.4A|CN111239909B|2020-02-14|2020-02-14|Graphene film optical fiber F-P resonator with photo-thermal stress regulation and control function and manufacturing method thereof|
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